Fundamental electron interactions with with plasma processing gases :: L. G. Christophorou :: ISBN 0306480379 :: Kluwer Academic/Plenum 2004 :: OBNB, the Open British National Bibliography

Publication Data

Title Fundamental electron interactions with with plasma processing gases
Author L. G. Christophorou
Contributor James Kenneth Olthoff
Publisher Kluwer Academic/Plenum
Publication date 2004
Publication location New York
Language English

Topics

Electron-molecule collisions
Plasma (Ionized gases)

Catalogue Data

OBNB ID GBA404826
ISBN 10 0306480379
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 539.757

ISBD

P1053 xii, 776 p.
P1042 Includes bibliographical references and index.

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Fundamental electron interactions with with plasma processing gases by L. G. Christophorou. ISBN 0306480379. Published by Kluwer Academic/Plenum in 2004. Publication and catalogue information, links to buy online and reader comments.