Silicon wafer bonding technology : for VLSI and MEMS applications :: ISBN 0852960395 :: Institution of Electrical Engineers 2002 :: OBNB, the Open British National Bibliography

Publication Data

Title Silicon wafer bonding technology : for VLSI and MEMS applications
Contributors Subramanian S. Iyer, Andre J. Auberton-Hervé, Institution of Electrical Engineers, Institution of Electrical Engineers
Publisher Institution of Electrical Engineers
Publication date 2002
Publication location London
Language English

Descriptive Notes

Includes index.

Topics

Silicon-on-insulator technology
Integrated circuits :: Very large scale integration
Microelectromechanical systems

Catalogue Data

OBNB ID GBA1V4185
ISBN 10 0852960395
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xxv, 149 p.
P1042 Includes bibliographical references and index.

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Silicon wafer bonding technology : for VLSI and MEMS applications. ISBN 0852960395. Published by Institution of Electrical Engineers in 2002. Publication and catalogue information, links to buy online and reader comments.