MEMS packaging

MEMS packaging

Publication Data

Title MEMS packaging
Contributors Tai-Ran Hsu, INSPEC
Publisher INSPEC
Publication date 2004
Publication location London
Language English

Topics

Microelectromechanical systems
Microelectronic packaging

Catalogue Data

OBNB ID GBA3U6621
ISBN 10 0863413358
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 xxix, 275 p.
P1042 Includes bibliographical references and index.

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MEMS packaging. ISBN 0863413358. Published by INSPEC in 2004. Publication and catalogue information, links to buy online and reader comments.

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