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Effect of disorder and defects in ion-implanted semiconductors : electrical and physico-chemical characterization

Publication Data

Title Effect of disorder and defects in ion-implanted semiconductors : electrical and physico-chemical characterization
Contributors Gérard Ghibaudo, Constantinos Christofides
Publisher Academic Press
Publication date 1997
Publication location San Diego
Language English

Descriptive Notes

Includes index.

Topics

Semiconductors
Ion implantation

Catalogue Data

OBNB ID GB97Z7647
ISBN 10 0127521453
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xix, 300p.

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Effect of disorder and defects in ion-implanted semiconductors : electrical and physico-chemical characterization. ISBN 0127521453. Published by Academic Press in 1997. Publication and catalogue information, links to buy online and reader comments.