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Ion implantation and beam processing

Publication Data

Title Ion implantation and beam processing
Contributors J. S. Williams, J. M. Poate
Publisher Academic
Publication date 1984
Publication location Sydney
Language English

Topics

Ion implantation
Ion bombardment
Semiconductor doping
011007360

Catalogue Data

OBNB ID GB8503757
ISBN 10 0127569804
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 537.622

ISBD

P1053 xi,419p.
P1042 Includes bibliographies and index.

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Ion implantation and beam processing. ISBN 0127569804. Published by Academic in 1984. Publication and catalogue information, links to buy online and reader comments.

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