Microstereomicrolithography and other fabrication techniques for 3D MEMS :: V. K. Varadan :: ISBN 047152185X :: Wiley 2001 :: OBNB, the Open British National Bibliography

Publication Data

Title Microstereomicrolithography and other fabrication techniques for 3D MEMS
Author V. K. Varadan
Contributors Xiaoning Jiang, V. V. Varadan
Publisher Wiley
Publication date 2001
Publication location Chichester
Language English

Topics

Microelectromechanical systems :: Design and construction
Microlithography
011615705

Catalogue Data

OBNB ID GBA208373
ISBN 10 047152185X
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 xiii, 260 p.
P1042 Includes bibliographical references and index.

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Microstereomicrolithography and other fabrication techniques for 3D MEMS by V. K. Varadan. ISBN 047152185X. Published by Wiley in 2001. Publication and catalogue information, links to buy online and reader comments.