Chemical physics of thin film deposition processes for micro- and nano-technologies :: ISBN 1402005245 :: Kluwer Academic Publishers 2002 :: OBNB, the Open British National Bibliography

Publication Data

Title Chemical physics of thin film deposition processes for micro- and nano-technologies
Contributors Y. Pauleau, Y. Pauleau
Publisher Kluwer Academic Publishers
Publication date 2002
Publication location Dordrecht
Language English

Descriptive Notes

Conference proceedings.
Published in cooperation with NATO Scientific Affairs Division.

Topics

Thin films :: Congresses
Microtechnology :: Congresses
Nanotechnology :: Congresses

Catalogue Data

OBNB ID GBA233902
ISBN 10 1402005245
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xiii, 363 p.
P1042 Includes bibliographical references and index.

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Chemical physics of thin film deposition processes for micro- and nano-technologies. ISBN 1402005245. Published by Kluwer Academic Publishers in 2002. Publication and catalogue information, links to buy online and reader comments.