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Enabling technologies for MEMS and nanodevices

Publication Data

Title Enabling technologies for MEMS and nanodevices
Contributor H. Baltes
Publisher Wiley-VCH
Publication date 2004
Publication location Weinheim
Language English

Topics

Microelectromechanical systems
Nanotechnology

Catalogue Data

OBNB ID GBA4X6651
ISBN 10 352730746X
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 620.5

ISBD

P1053 xii, 427 p.

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Enabling technologies for MEMS and nanodevices. ISBN 352730746X. Published by Wiley-VCH in 2004. Publication and catalogue information, links to buy online and reader comments.

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