CMOS-MEMS

CMOS-MEMS

Publication Data

Title CMOS-MEMS
Contributors Oliver Brand, G. K. Fedder
Publisher Wiley-VCH
Publication date 2005
Publication location Weinheim
Language English

Topics

Metal oxide semiconductors, Complementary
Microelectromechanical systems

Catalogue Data

OBNB ID GBA475844
ISBN 10 3527310800
ISBN 13 9783527310807
Type BibliographicResource, Book
Dewey Classification 621.3815

ISBD

P1053 xiv, 594 p.
P1042 Includes bibliographical references and index.

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