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Principles of physical vapor deposition of thin films

K. S. Sree Harsha

Publication Data

Title Principles of physical vapor deposition of thin films
Author K. S. Sree Harsha
Publisher Elsevier
Publication date 2006
Publication location Amsterdam
Language English

Topics

Thin films
013264806

Catalogue Data

OBNB ID GBA564694
ISBN 10 008044699X
ISBN 13 9780080446998
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xi, 1160 p.
P1042 Includes bibliographical references and index.

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Principles of physical vapor deposition of thin films by K. S. Sree Harsha. ISBN 9780080446998. Published by Elsevier in 2006. Publication and catalogue information, links to buy online and reader comments.

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