Fundamentals of semiconductor manufacturing and process control :: Gary S. May :: ISBN 9780471784067 :: IEEE Wiley-Interscience 2006 :: OBNB, the Open British National Bibliography

Publication Data

Title Fundamentals of semiconductor manufacturing and process control
Author Gary S. May
Contributor Costas J. Spanos
Publisher IEEE Wiley-Interscience
Publication date 2006
Publication location Hoboken, N.J.
Language English

Topics

Semiconductors :: Design and construction
Integrated circuits :: Design and construction
013414729

Catalogue Data

OBNB ID GBA627486
ISBN 10 0471784060
ISBN 13 9780471784067
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xix, 463 p.
P1042 Includes bibliographical references and index.

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Fundamentals of semiconductor manufacturing and process control by Gary S. May. ISBN 9780471784067. Published by IEEE Wiley-Interscience in 2006. Publication and catalogue information, links to buy online and reader comments.