Advances in resist technology and processing XXIII : 20-22 February, 2006 :: ISBN 0819461962 :: SPIE 2006 :: OBNB, the Open British National Bibliography

Publication Data

Title Advances in resist technology and processing XXIII : 20-22 February, 2006
Contributors Qinghuang Lin, Society of Photo-optical Instrumentation Engineers
Publisher SPIE
Publication date 2006
Publication location Washington
Language English

Descriptive Notes

Conference papers.

Topics

Electric resistors :: Congresses
Semiconductors :: Congresses
Lithography, Electron beam :: Congresses
Optical engineering

Catalogue Data

OBNB ID GBA6A5090
ISBN 10 0819461962
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381531

ISBD

P1053 2 v.
P1042 Includes bibliographical references and index.

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Advances in resist technology and processing XXIII : 20-22 February, 2006. ISBN 0819461962. Published by SPIE in 2006. Publication and catalogue information, links to buy online and reader comments.