P1008>3., 3., vollständig überarbeitete und erw. Aufl
P1053 xvi, 574 p.
P1042 Includes bibliographical references and index.
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Mikrosystemtechnik für Ingenieure by W. Menz. ISBN 9783527305360. Published by Wiley-VCH in 2005. Publication and catalogue information, links to buy online and reader comments.