MEMS and microsystems : design, manufacture and nanoscale engineering :: Tai-Ran Hsu :: ISBN 9780470083017 :: Wiley 2008 :: OBNB, the Open British National Bibliography

Publication Data

Title MEMS and microsystems : design, manufacture and nanoscale engineering
Author Tai-Ran Hsu
Publisher Wiley
Publication date 2008
Publication location Hoboken, N.J.
Language English

Descriptive Notes

Previous ed.: 2002.

Topics

Microelectronics
014507954

Catalogue Data

OBNB ID GBA813225
ISBN 10 0470083018
ISBN 13 9780470083017
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1008>2nd 2nd ed.
P1053 xxv, 550 p.
P1042 Includes bibliographical references and index.

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MEMS and microsystems : design, manufacture and nanoscale engineering by Tai-Ran Hsu. ISBN 9780470083017. Published by Wiley in 2008. Publication and catalogue information, links to buy online and reader comments.