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MEMS and microsystems : design, manufacture and nanoscale engineering
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MEMS and microsystems : design, manufacture and nanoscale engineering

Tai-Ran Hsu

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Previous ed.: 2002.

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MEMS and microsystems : design, manufacture and nanoscale engineering by Tai-Ran Hsu. ISBN 9780470083017. Published by Wiley in 2008. Publication and catalogue information, links to buy online and reader comments.

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