CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications :: D. Lange :: ISBN 3540431438 :: Springer 2002 :: OBNB, the Open British National Bibliography

Publication Data

Title CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications
Author D. Lange
Contributors Oliver Brand, H. Baltes
Publisher Springer
Publication date 2002
Publication location Berlin
Language English

Topics

Microelectromechanical systems :: Design and construction
Metal oxide semiconductors, Complementary :: Design and construction
Levers :: Design and construction
Atomic force microscopy :: Equipment and supplies :: Design and construction
Gas detectors :: Design and construction

Catalogue Data

OBNB ID GBA864715
ISBN 10 3540431438
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 681.413

ISBD

P1053 viii, 142 p.
P1042 Includes bibliographical references (p. [131]-140) and index.

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CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications by D. Lange. ISBN 3540431438. Published by Springer in 2002. Publication and catalogue information, links to buy online and reader comments.