CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO2 on Si :: M. P. Seah :: National Physical Laboratory 2008 :: OBNB, the Open British National Bibliography

Publication Data

Title CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO2 on Si
Author M. P. Seah
Contributors , National Physical Laboratory
Publisher National Physical Laboratory
Publication date 2008
Publication location Teddington
Language English

Descriptive Notes

Title from PDF title page (viewed on Feb. 19, 2009).
"August 2008."

Topics

Silicon oxide :: Measurement
Metal oxide semiconductors

Catalogue Data

OBNB ID GBA918751
ISBN 10 n/a
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381520287

ISBD

P1053 46 p.
P1042 Includes bibliographical references.

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CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO2 on Si by M. P. Seah. Published by National Physical Laboratory in 2008. Publication and catalogue information, links to buy online and reader comments.