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CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO₂ on Si

M. P. Seah

Publication Data

Title CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO₂ on Si
Author M. P. Seah
Contributors , National Physical Laboratory
Publisher National Physical Laboratory
Publication date 2008
Publication location Teddington
Language English

Topics

Silicon oxide :: Measurement
Metal oxide semiconductors

Catalogue Data

OBNB ID GBA903434
ISBN 10 n/a
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381520287

ISBD

P1053 38 p.
P1042 Includes bibliographical references.

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CCQM-K32 key comparison and P84 pilot study amount of silicon oxide as a thickness of SiO₂ on Si by M. P. Seah. Published by National Physical Laboratory in 2008. Publication and catalogue information, links to buy online and reader comments.