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Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009

Publication Data

Title Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009
Contributor David G. Seiler
Publisher American Institute of Physics
Publication date 2009
Publication location Melville
Language English

Descriptive Notes

Conference proceedings.

Topics

Integrated circuits :: Ultra large scale integration :: Congresses
Nanoelectronics :: Congresses
Metrology :: Congresses

Catalogue Data

OBNB ID GBA9A7214
ISBN 10 0735407126
ISBN 13 9780735407121
Type BibliographicResource, Book
Dewey Classification 621.3815

ISBD

P1053 xii, 398 p.
P1042 Includes bibliographical references and index.

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Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11-15 May 2009. ISBN 9780735407121. Published by American Institute of Physics in 2009. Publication and catalogue information, links to buy online and reader comments.