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Atomic layer deposition of nanostructured materials

Publication Data

Title Atomic layer deposition of nanostructured materials
Contributors Nicola Pinna, Mato Knez
Publisher Wiley-VCH
Publication date 2012
Publication location Weinheim
Language English

Topics

Chemical vapor deposition
015847059

Catalogue Data

OBNB ID GBB184063
ISBN 10 3527327975
ISBN 13 9783527327973
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xxxvi, 435 p.
P1042 Includes bibliographical references and index.

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Atomic layer deposition of nanostructured materials. ISBN 9783527327973. Published by Wiley-VCH in 2012. Publication and catalogue information, links to buy online and reader comments.

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