Alternative lithographic technologies VII :: ISBN 9781628415254 :: SPIE 2015 :: OBNB, the Open British National Bibliography

Publication Data

Title Alternative lithographic technologies VII
Contributors Douglas J. Resnick, Christopher Bencher, SPIE
Publisher SPIE
Publication date 2015
Publication location Bellingham, Washington
Language English

Topics

Extreme ultraviolet lithography :: Congresses
Lithography, Electron beam :: Congresses
Microlithography :: Industrial applications :: Congresses
Masks (Electronics) :: Congresses

Catalogue Data

OBNB ID GBB542246
ISBN 10 1628415258
ISBN 13 9781628415254
Type BibliographicResource, Book
Dewey Classification 621.381531

ISBD

P1053 1 volume (various pagings)
P1042 Includes bibliographical references.

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Alternative lithographic technologies VII. ISBN 9781628415254. Published by SPIE in 2015. Publication and catalogue information, links to buy online and reader comments.