Metrology, inspection, and process control for microlithography XXIX : 23-26 February 2015, San Jose, California, United States :: ISBN 9781628415261 :: SPIE 2015 :: OBNB, the Open British National Bibliography

Publication Data

Title Metrology, inspection, and process control for microlithography XXIX : 23-26 February 2015, San Jose, California, United States
Contributors Jason P. Cain, Martha I. Sanchez, Society of Photo-optical Instrumentation Engineers
Publisher SPIE
Publication date 2015
Publication location Bellingham, Washington, USA
Volumes 2
Language English

Descriptive Notes

"SPIE advanced lithography"--Cover.

Topics

Microlithography :: Congresses
Integrated circuits :: Inspection :: Congresses
Integrated circuits :: Measurement :: Congresses
Process control :: Congresses

Catalogue Data

OBNB ID GBB542247
ISBN 10 1628415266
ISBN 13 9781628415261
Type BibliographicResource, MultiVolumeBook
Dewey Classification 621.381531

ISBD

P1053 2 volumes
P1042 Includes bibliographical references and author index.

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Metrology, inspection, and process control for microlithography XXIX : 23-26 February 2015, San Jose, California, United States. ISBN 9781628415261. Published by SPIE in 2015. Publication and catalogue information, links to buy online and reader comments.