Optical Microlithography XXVIII :: ISBN 9781628415285 :: SPIE 2015 :: OBNB, the Open British National Bibliography

Publication Data

Title Optical Microlithography XXVIII
Contributors Kafai Lai, Andreas Erdmann, SPIE
Publisher SPIE
Publication date 2015
Publication location Bellingham, Washington
Language English

Topics

Microlithography :: Congresses
Integrated circuits :: Masks :: Congresses
X-ray lithography :: Congresses
Manufacturing processes :: Congresses

Catalogue Data

OBNB ID GBB542249
ISBN 10 1628415282
ISBN 13 9781628415285
Type BibliographicResource, Book
Dewey Classification 621.381531

ISBD

P1053 1 volume (various pagings)
P1042 Includes bibliographical references.

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Optical Microlithography XXVIII. ISBN 9781628415285. Published by SPIE in 2015. Publication and catalogue information, links to buy online and reader comments.