Extreme ultraviolet (EUV) lithography VI : 23-26 February 2015, San Jose, California, United States :: ISBN 9781628415247 :: SPIE 2015 :: OBNB, the Open British National Bibliography

Publication Data

Title Extreme ultraviolet (EUV) lithography VI : 23-26 February 2015, San Jose, California, United States
Contributors Obert R. Wood, Eric M. Panning, Society of Photo-optical Instrumentation Engineers
Publisher SPIE
Publication date 2015
Publication location Bellingham, Washington
Volumes 2
Language English

Topics

Extreme ultraviolet lithography :: Congresses
Ultraviolet radiation :: Industrial applications :: Congresses

Catalogue Data

OBNB ID GBB547861
ISBN 10 162841524X
ISBN 13 9781628415247
Type BibliographicResource, MultiVolumeBook
Dewey Classification 621.364

ISBD

P1053 2 volumes
P1042 Includes bibliographical references and author index.

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Extreme ultraviolet (EUV) lithography VI : 23-26 February 2015, San Jose, California, United States. ISBN 9781628415247. Published by SPIE in 2015. Publication and catalogue information, links to buy online and reader comments.