Microelectromechanical systems :: Design and construction
Nanoelectromechanical systems :: Design and construction
Catalogue Data
OBNB ID GBB623210
ISBN 10 1119083877
ISBN 13 9781119083870
Type BibliographicResource, Book
Dewey Classification 621.381
ISBD
P1053 1 online resource.
P1042 Includes bibliographical references and index.
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Materials and failures in MEMS and NEMS. ISBN 9781119083870. Published by Wiley in 2015. Publication and catalogue information, links to buy online and reader comments.