Handbook of microlithography, micromachining, and microfabrication :: ISBN 0819423785 :: SPIE Optical Engineering Press 1997 :: OBNB, the Open British National Bibliography

Publication Data

Title Handbook of microlithography, micromachining, and microfabrication
Contributors P. Rai-Choudhury, Institution of Electrical Engineers
Publisher SPIE Optical Engineering Press
Publication date 1997
Publication location Bellingham, Wash.
Language English

Descriptive Notes

Includes index.

Topics

Microlithography
Micromachining
Microfabrication

Catalogue Data

OBNB ID GB9769449
ISBN 10 0819423785
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.3815

ISBD

P1053 692p.

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Handbook of microlithography, micromachining, and microfabrication. ISBN 0819423785. Published by SPIE Optical Engineering Press in 1997. Publication and catalogue information, links to buy online and reader comments.