Reduced thermal processing for ULSI :: ISBN 0306433826 :: Plenum Press 1989 :: OBNB, the Open British National Bibliography

Publication Data

Title Reduced thermal processing for ULSI
Contributors R. A. Levy, R. A. Levy
Publisher Plenum Press
Publication date 1989
Language English

Descriptive Notes

Proceedings of a NATO Advanced Study Institute held in Boca Raton, Fla.1988.
Published in cooperation with NATO Scientific Affairs Division.

Topics

007068791

Catalogue Data

OBNB ID GB9146114
ISBN 10 0306433826
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.395

ISBD

P1053 xi, 438 p.
P1042 Includes bibliographical references.

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Reduced thermal processing for ULSI. ISBN 0306433826. Published by Plenum Press in 1989. Publication and catalogue information, links to buy online and reader comments.