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Rapid thermal processing of semiconductors

V. E. Borisenko

Publication Data

Title Rapid thermal processing of semiconductors
Author V. E. Borisenko
Contributor P. J. Hesketh
Publication date 1997
Publication location New York
Language English

Descriptive Notes

Includes index.

Topics

Semiconductors :: Design and construction
Rapid thermal processing

Catalogue Data

OBNB ID GB9747899
ISBN 10 0306450542
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xxii, 358p.

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