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Ion implantation, sputtering and their applications

Peter David Townsend

Publication Data

Title Ion implantation, sputtering and their applications
Author Peter David Townsend
Contributors John Clive Kelly, Nicholas Edmund Whittam Hartley
Publisher Academic Press
Publication date 1976
Publication location London
Language English

Topics

Ion implantation
007679567

Catalogue Data

OBNB ID GB7625089
ISBN 10 0126969507
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 539.754

ISBD

P1053 ix,333p.
P1042 Includes bibliographies and index.

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Ion implantation, sputtering and their applications by Peter David Townsend. ISBN 0126969507. Published by Academic Press in 1976. Publication and catalogue information, links to buy online and reader comments.

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