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Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300mm Silicon of the E-MRS Spring Con

Publication Data

Title Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300mm Silicon of the E-MRS Spring Con
Contributors H. Richter, P. Wagner, G. Ritter, European Materials Research Society
Publisher Elsevier
Publication date 1999
Publication location Amsterdam
Language English

Descriptive Notes

Reprinted from: Microelectronic engineering, v.45/2-3.

Topics

Silicon :: Congresses
Semiconductors :: Congresses

Catalogue Data

OBNB ID GB9969808
ISBN 10 0080436099
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.3815

ISBD

P1053 vi,p85-297p.
P1042 Includes bibliographical references.

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Techniques and challenges for 300 mm silicon : processing, characterization, modelling and equipment : proceedings of Symposium F on Techniques and Challenges for 300mm Silicon of the E-MRS Spring Con. ISBN 0080436099. Published by Elsevier in 1999. Publication and catalogue information, links to buy online and reader comments.