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Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998

Publication Data

Title Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998
Contributors D. Barbier, European Materials Research Society
Publisher Elsevier
Publication date 1999
Publication location Amsterdam
Language English

Descriptive Notes

Reprinted from: Sensors and actuators, v. 74, no. 1-3, 1999.

Topics

Detectors :: Congresses
Microactuators :: Congresses
Microelectromechanical systems :: Congresses
Microelectronics :: Congresses

Catalogue Data

OBNB ID GB9963489
ISBN 10 0080436110
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 257 p.
P1042 Includes bibliographical references and index.

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Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998. ISBN 0080436110. Published by Elsevier in 1999. Publication and catalogue information, links to buy online and reader comments.