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Rapid Thermal Processing : proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998

Publication Data

Title Rapid Thermal Processing : proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998
Contributors A. Slaoui, European Materials Research Society
Publisher Elsevier
Publication date 1999
Publication location Amsterdam
Language English

Descriptive Notes

Reprinted from Materials Science in Semiconductor Processing, vol.1/3-4.

Topics

Rapid thermal processing :: Congresses

Catalogue Data

OBNB ID GB9930136
ISBN 10 0080436129
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 p170-350
P1042 Includes bibliographical references.

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Rapid Thermal Processing : proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998. ISBN 0080436129. Published by Elsevier in 1999. Publication and catalogue information, links to buy online and reader comments.