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Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics Strasbourg, France, 16

Publication Data

Title Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics Strasbourg, France, 16
Contributors J. K. N. Lindner, European Materials Research Society
Publisher Elsevier
Publication date 1999
Publication location Amsterdam
Language English

Descriptive Notes

Reprinted from Nuclear Instruments and Methods B, vol.147/1-4.

Topics

Ion implantation :: Congresses
Semiconductors :: Congresses
Oxides :: Congresses
Ceramics :: Congresses

Catalogue Data

OBNB ID GB9930138
ISBN 10 0080436137
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xiv,442p.
P1042 Includes bibliographical references and index.

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Ion implantation into semiconductors, oxides and ceramics : proceedings of the E-MRS 1998 Spring Meeting Symposium J on Ion Implantation Into Semiconductors, Oxides and Ceramics Strasbourg, France, 16. ISBN 0080436137. Published by Elsevier in 1999. Publication and catalogue information, links to buy online and reader comments.