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Materials and processes for submicron technologies : proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 199

Publication Data

Title Materials and processes for submicron technologies : proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 199
Contributors J. M. Martinez-Duart, R. Madar, R. A. Levy, European Materials Research Society
Publisher Elsevier
Publication date 1999
Publication location Amsterdam
Language English

Descriptive Notes

Repr. from Solid state electronics, v.43/6.

Topics

Microstructure :: Congresses
Semiconductors :: Congresses
Electron transport :: Congresses

Catalogue Data

OBNB ID GBA001190
ISBN 10 008043617X
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.3815

ISBD

P1053 p. 1002-1175
P1042 Includes bibliographical references.

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Materials and processes for submicron technologies : proceedings of Symposium N on Materials and Processes for Submicron Technologies of the E-MRS Spring Conference, Strasbourg, France, 16-19 June 199. ISBN 008043617X. Published by Elsevier in 1999. Publication and catalogue information, links to buy online and reader comments.