Handbook of advanced plasma processing techniques :: ISBN 3540667725 :: Springer 2000 :: OBNB, the Open British National Bibliography

Publication Data

Title Handbook of advanced plasma processing techniques
Contributors R. J. Shul, S. J. Pearton
Publisher Springer
Publication date 2000
Publication location Berlin
Language English

Topics

Plasma engineering
Electronic circuits :: Design and construction
Plasma etching
Plasma spraying

Catalogue Data

OBNB ID GBA060550
ISBN 10 3540667725
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.044

ISBD

P1053 xvi, 653 p.
P1042 Includes bibliographical references and index.

Buy a copy

OBNB doesn't sell books, but you may be able to find a copy at one of these websites:

Handbook of advanced plasma processing techniques. ISBN 3540667725. Published by Springer in 2000. Publication and catalogue information, links to buy online and reader comments.