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Transmission electron microscopy of silicon VLSI circuits and structures

R. B. Marcus

Publication Data

Title Transmission electron microscopy of silicon VLSI circuits and structures
Author R. B. Marcus
Contributor T. T. Sheng
Publisher Wiley
Publication date 1983
Publication location New York
Language English

Descriptive Notes

Includes index.

Topics

Integrated circuits
008062653

Catalogue Data

OBNB ID GB8436929
ISBN 10 0471092517
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.395

ISBD

P1053 x, 217 p.

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Transmission electron microscopy of silicon VLSI circuits and structures by R. B. Marcus. ISBN 0471092517. Published by Wiley in 1983. Publication and catalogue information, links to buy online and reader comments.

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