Fundamental aspects of ultrathin dielectrics on Si-based devices :: ISBN 0792350073 :: Kluwer Academic 1998 :: OBNB, the Open British National Bibliography

Publication Data

Title Fundamental aspects of ultrathin dielectrics on Si-based devices
Contributors Eric L. Garfunkel, E. L. Gusev, Alexander Vul', Alexander Vul'
Publisher Kluwer Academic
Publication date 1998
Publication location Dordrecht
Language English

Descriptive Notes

Includes index.
Published in cooperation with NATO Scientific Affairs Division.

Topics

Silicon-on-insulator technology :: Congresses
Dielectric films :: Congresses

Catalogue Data

OBNB ID GB9833175
ISBN 10 0792350073
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 x, 507p.

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Fundamental aspects of ultrathin dielectrics on Si-based devices. ISBN 0792350073. Published by Kluwer Academic in 1998. Publication and catalogue information, links to buy online and reader comments.