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MEMS and microsystems : design and manufacture

Tai-Ran Hsu

Publication Data

Title MEMS and microsystems : design and manufacture
Author Tai-Ran Hsu
Publisher McGraw-Hill
Publication date 2002
Publication location Boston
Language English

Topics

Microelectronics
Microelectromechanical systems
009047800

Catalogue Data

OBNB ID GBA254248
ISBN 10 0072393912
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 xii, 436 p.
P1042 Includes bibliographical references (p. 427-431) and index.

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MEMS and microsystems : design and manufacture by Tai-Ran Hsu. ISBN 0072393912. Published by McGraw-Hill in 2002. Publication and catalogue information, links to buy online and reader comments.

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