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Characterization in silicon processing

Publication Data

Title Characterization in silicon processing
Contributor Yale Strausser
Publisher Butterworth-Heinemann
Publication date 1993
Publication location Boston
Language English

Topics

Silicon
Electric conductors
Semiconductor films
Surface chemistry

Catalogue Data

OBNB ID GB9403842
ISBN 10 0750691727
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 620.193

ISBD

P1053 xiii,240p.
P1042 Includes bibliographical references and index.

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Characterization in silicon processing. ISBN 0750691727. Published by Butterworth-Heinemann in 1993. Publication and catalogue information, links to buy online and reader comments.

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