Plasma-surface interactions and processing of materials :: ISBN 0792305841 :: Kluwer Academic Publishers 1990 :: OBNB, the Open British National Bibliography

Publication Data

Title Plasma-surface interactions and processing of materials
Contributor Orlando Auciello
Publisher Kluwer Academic Publishers
Publication date 1990
Language English

Descriptive Notes

Proceedings of the NATO Advanced Study Institute on Plasma-Surface Interactions and Processing of Materials held at Alicante, Spain in 1988.

Topics

Surfaces (Technology) :: Congresses
Materials :: Effect of radiation on :: Congresses
Microelectronics :: Materials :: Effect of radiation on :: Congresses
009090944

Catalogue Data

OBNB ID GB9146083
ISBN 10 0792305841
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 620.44

ISBD

P1053 xiii, 557 p.
P1042 Includes bibliographical references.

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Plasma-surface interactions and processing of materials. ISBN 0792305841. Published by Kluwer Academic Publishers in 1990. Publication and catalogue information, links to buy online and reader comments.