Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices :: ISBN 0792322657 :: Kluwer 1993 :: OBNB, the Open British National Bibliography

Publication Data

Title Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
Contributors Orlando Auciello, Jürgen Engemann, Jürgen Engemann
Publisher Kluwer
Publication date 1993
Publication location Dordrecht
Language English

Descriptive Notes

Published in cooperation with NATO Scientific Affairs Division.
Includes index.

Topics

Thin film devices :: Congresses
Thin films :: Congresses

Catalogue Data

OBNB ID GB9329934
ISBN 10 0792322657
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 xv,633p.

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Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices. ISBN 0792322657. Published by Kluwer in 1993. Publication and catalogue information, links to buy online and reader comments.