Plasma processing of semiconductors :: ISBN 0792345673 :: Kluwer Academic 1997 :: OBNB, the Open British National Bibliography

Publication Data

Title Plasma processing of semiconductors
Contributors P. F. Williams, P. F. Williams
Publisher Kluwer Academic
Publication date 1997
Publication location Dordrecht
Language English

Descriptive Notes

Includes index.
"Published in cooperation with NATO Scientific Affairs Division".

Topics

Plasma engineering :: Congresses
Semiconductors :: Etching :: Congresses
Plasma etching :: Industrial applications :: Congresses
Plasma chemistry :: Industrial applications :: Congresses

Catalogue Data

OBNB ID GB9743328
ISBN 10 0792345673
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 x, 613p.

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Plasma processing of semiconductors. ISBN 0792345673. Published by Kluwer Academic in 1997. Publication and catalogue information, links to buy online and reader comments.