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Micromachining silicon for MEMS

Jürgen H. Daniel

Publication Data

Title Micromachining silicon for MEMS
Author Jürgen H. Daniel
Contributor D. F. Moore
Publisher MTP
Publication date 1999
Publication location Cambridge
Language English

Topics

Microelectromechanical systems
009750658

Catalogue Data

OBNB ID GB9914034
ISBN 10 095351420X
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 viii,145p.
P1042 Includes bibliographical references and index.

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Micromachining silicon for MEMS by Jürgen H. Daniel. ISBN 095351420X. Published by MTP in 1999. Publication and catalogue information, links to buy online and reader comments.

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