Fabrication engineering at the micro- and nanoscale :: Stephen A. Campbell :: ISBN 9780195320176 :: Oxford University Press 2008 :: OBNB, the Open British National Bibliography

Publication Data

Title Fabrication engineering at the micro- and nanoscale
Author Stephen A. Campbell
Publisher Oxford University Press
Publication date 2008
Publication location New York
Language English

Descriptive Notes

Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.

Topics

Semiconductors :: Design and construction

Catalogue Data

OBNB ID GBA993310
ISBN 10 0195320174
ISBN 13 9780195320176
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1008>3rd 3rd ed.
P1053 xiv, 647 p.
P1042 Includes bibliographical references and index.

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Fabrication engineering at the micro- and nanoscale by Stephen A. Campbell. ISBN 9780195320176. Published by Oxford University Press in 2008. Publication and catalogue information, links to buy online and reader comments.