Overview of tomography techniques to measure wafer thickness in MEMS structures :: Andy Robinson :: NPL 2008 :: OBNB, the Open British National Bibliography

Publication Data

Title Overview of tomography techniques to measure wafer thickness in MEMS structures
Author Andy Robinson
Contributors R. K. Leach, National Physical Laboratory
Publisher NPL
Publication date 2008
Publication location Teddington
Language English

Descriptive Notes

Title from PDF title page (viewed on 26 Aug., 2009).

Topics

Microelectromechanical systems :: Measurement
Tomography

Catalogue Data

OBNB ID GBA985492
ISBN 10 n/a
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 47 p.
P1042 Includes bibliographical references.

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Overview of tomography techniques to measure wafer thickness in MEMS structures by Andy Robinson. Published by NPL in 2008. Publication and catalogue information, links to buy online and reader comments.