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Overview of tomography techniques to measure wafer thickness in MEMS structures

Andy Robinson

Publication Data

Title Overview of tomography techniques to measure wafer thickness in MEMS structures
Author Andy Robinson
Contributors R. K. Leach, National Physical Laboratory
Publisher National Physical Laboratory
Publication date 2008
Publication location Teddington
Language English

Topics

Microelectromechanical systems :: Measurement
Tomography

Catalogue Data

OBNB ID GBA903487
ISBN 10 n/a
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 41 p.
P1042 Includes bibliographical references.

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Overview of tomography techniques to measure wafer thickness in MEMS structures by Andy Robinson. Published by National Physical Laboratory in 2008. Publication and catalogue information, links to buy online and reader comments.