The science and engineering of microelectronic fabrication :: Stephen A. Campbell :: ISBN 0195136055 :: Oxford University Press 2001 :: OBNB, the Open British National Bibliography

Publication Data

Title The science and engineering of microelectronic fabrication
Author Stephen A. Campbell
Publisher Oxford University Press
Publication date 2001
Publication location New York
Language English

Descriptive Notes

Previous ed.: 1996.

Topics

Semiconductors :: Design and construction

Catalogue Data

OBNB ID GBA122403
ISBN 10 0195136055
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1008>2nd 2nd ed.
P1053 xiv, 603 p.
P1042 Includes bibliographical references and index.

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The science and engineering of microelectronic fabrication by Stephen A. Campbell. ISBN 0195136055. Published by Oxford University Press in 2001. Publication and catalogue information, links to buy online and reader comments.