X-ray metrology in semiconductor manufacturing :: D. Keith Bowen :: ISBN 0849339286 :: CRC 2006 :: OBNB, the Open British National Bibliography

Publication Data

Title X-ray metrology in semiconductor manufacturing
Author D. Keith Bowen
Contributor B. K. Tanner
Publisher CRC
Publication date 2006
Publication location Boca Raton, Fla.
Language English

Topics

Semiconductors :: Design and construction :: Quality control
Integrated circuits :: Measurement
Semiconductor wafers :: Inspection
X-rays :: Diffraction
013338095

Catalogue Data

OBNB ID GBA597324
ISBN 10 0849339286
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.38152

ISBD

P1053 279 p.
P1042 Includes bibliographical references and index.

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X-ray metrology in semiconductor manufacturing by D. Keith Bowen. ISBN 0849339286. Published by CRC in 2006. Publication and catalogue information, links to buy online and reader comments.